Mr. Ma serves as Corporate Vice President and business unit head thermal ALD and Vertical Furnaces. He joined ASM in 2018 as Vice President and key product unit (KPU) head.

In 2020, he became the business unit head for thermal ALD, responsible for developing ASM’s ALD products, and in 2024, also for Vertical Furnaces. He was appointed an Executive Committee member of ASM International on July 23, 2024.

Paul has more than 20 years of experience in the semiconductor equipment industry. Before joining ASM, he had a 14-year tenure with Applied Materials. He started his career as a process development engineer on various ALD and CVD applications, rising to the level of managing director and KPU head of the Metal Deposition Products division.  

Paul received a bachelor’s and master’s degree in chemical and materials engineering from Auckland University and a PhD in chemical engineering from Cornell University. He has written over 30 technical articles and holds over 100 patents. He is a US, New Zealand, and Taiwanese national.